Based on the high-tier team theory, this paper takes the software service industry under the high-tech service industry as the research entry point and the listed companies in the software service sector of the A-Shares of the Shanghai and Shenzhen stock markets as samples.Using a clear set of qualitative comparative analysis method (csQCA), selecting six factors including academic level, international background, technical matching, gender, self-confidence, and government association in the analysis and consideration, and an exploratory study is conducted on the configuration path of CEO heterogeneity that affects the innovation performance of high-tech service industry. Research shows that the CEOs of companies that produce high innovation performance exhibit four types of models including“technical CEO”,“high confidence-political CEO”,“high education-political CEO”and“high confidence-international CEO”. Among them, male CEOs occupy a strong position, and their“localization”phenomenon is more obvious. The combination of heterogeneous conditions associated with their education level and government can be replaced with the combination of conditions with international background and self-confidence, which can promote enterprises to achieve high levels of innovation performance. However, there is still a“black box effect”on the relationship between non-high innovation performance and CEO heterogeneity.