SiO2/PET packaging films were prepared by magnetron sputtering. The effects of sputtering power, sputtering time, vacuum degree, and argon flow on the adhesion strength of films were researched. Results showed that the adhesion strength increased with the rise of sputtering power, sputtering time and vacuum degree, and then showed a little downtrend. Among the four process parameters, the sputtering time exhibited the greatest impact on the adhesion strength, while vacuum degree and argon flow revealed the slightest influence on the adhesion strength, and the influence of the sputtering power appeared intermediate.