基于SPH方法对多晶硅裂纹扩展的数值模拟
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Numerical Simulation of Crack Propagation in Polycrystalline Silicon Based on SPH Method
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    摘要:

    应用非动力学软件Autodyn-2D对多 晶硅受冲击载荷作用而损伤开裂的连续介质离散化过程进行了研究。采用光滑粒子流体动力学(SPH)方法,分别模拟了不同宽度的钨合金锤在不同的位置以不同的冲击速度对多晶硅靶板的冲击过程,分析了不同冲击载荷下的裂纹产生与扩展方式,得出了锤头冲击速度、冲击面宽度、冲击位置对多晶硅裂纹与碎片粒度的影响结果。综合仿真结果表明,当锤头冲击速度小于25 m/s时,多晶硅的起裂点随着冲击速度的增大向中轴线靠近;当冲击速度大于25 m/s时,主裂纹扩展长度不再增加,但分叉裂纹密度增大;当冲击速度大于40 m/s时,裂纹扩展基本不变;当锤头宽度为20 mm,冲击速度为40 m/s,采用击打多晶硅中心位置的打击方式,能有效将多晶硅的破碎尺寸控制在5~90 mm之间,大大减少了多晶硅浪费。

    Abstract:

    Using AUTODYN-2D non-kinetic software, a research has been carried out on the discretization process of continuous media with damage cracking due to the impact load of polysilicon. By Using SPH method, a simulation test has been carried out of the impact process of different width tungsten alloy hammers on polycrystalline silicon target at different positions and different impact speeds, followed by an analysis of the crack generation and propagation modes under different impact loads, thus obtaining the relationship between impact velocity, shape and size of impact surface, impact location and particle size of fragments. The simulation results show that when the impact velocity is less than 25 m/s, the crack point approaches the central axis with increasing speed. When the impact velocity is greater than 25 m/s, the length of the main crack expansion will no longer increase, while the density of the bifurcation crack will increase. When the impact velocity is greater than 40 m/s, the crack propagation remains basically unchanged. When the width of the hammer head is 20 mm and the impact velocity is 40 m/s, the impact method of hitting the center of polysilicon can effectively control the broken size between 5~90 mm to greatly reduce polysilicon waste.

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倪正顺,袁锦龙,孙 晓,俞 毅,曾 成.基于SPH方法对多晶硅裂纹扩展的数值模拟[J].湖南工业大学学报,2020,34(3):39-48.

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  • 收稿日期:2019-06-11
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  • 在线发布日期: 2020-05-26
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